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To determine layer thickness (between 0.5 and 400 nm), density and roughness (between 0 and 2 nm) with about 1% accuracy, independently of each other. The minimum sample size is 20 mm by 10 mm.

Category: X-Ray Reflectometry (XRR)
Managed by: Department of Chemistry, University of Oxford
Location: Chemistry Research Laboratory, University Science Area
Facility: Surface Analysis Facility (SAF)
Availability: http://saf.chem.ox.ac.uk/booking-oxford.aspx
Shareability: None
Access prerequisites: Part of the Surface Analysis Facility (SAF). Facility open to other University departments (if capacity).
Restrictions on use: Trained personnel only.
More information: http://saf.chem.ox.ac.uk/home.aspx

Contact information

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