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Cleanroom Facility

150 m² of cleanroom space, class 10,000.
* Measurement Suite: 236 Source measure unit, 2410 HV Digital Sourcemeter, 2420 HC Digital sourcemeter,590 CV Analyser,2361 Trigger control unit, 7001 80 CH Switching system with installed 7065 Hall Effect Card.
* Metal Deposition: Eurocoater thermal evaporator and the EBS-1800 e-beam deposition equipment.
* Yellow Area for Photolithography: Quintel Q4000-6 Mask Aligner.
* Reactive Ion Etching: Plasmalab RIE-80 Plus.
* Plasma Enhanced Chemical Vapour Deposition (PECVD): Plasmalab DP-80 Plus.
* Wafer Microscope: Olympus BX51 reflective microscope.
* Rapid Thermal Annealing system: Jipelec Jetfirst Rapid Thermal Annealing Processor.

Category: Cleanroom
Managed by: Department of Materials, University of Oxford
Location: Christian Building, Begbroke Science Park
Facility: Cleanroom Facility
Shareability: None
Access prerequisites: Facility open to other University departments (if capacity).
More information: https://www.materials.ox.ac.uk/local/clean/cleanroom.html

Contact information

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