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Bio-Rad PT7125 Barrel Plasma Etcher

A 150 W, 13.56 MHz cylindrical plasma chamber designed to produce an isotropic etch.

Category: Oxygen Plasma Etcher
Managed by: Department of Chemistry, University of Oxford
Location: Chemistry Research Laboratory, University Science Area
Facility: Surface Analysis Facility (SAF)
Availability: http://saf.chem.ox.ac.uk/booking-oxford.aspx
Shareability: None
Access prerequisites: Part of the Surface Analysis Facility (SAF). Facility open to other University departments (if capacity).
Restrictions on use: Trained personnel only. Offered as a service.
More information: http://saf.chem.ox.ac.uk/home.aspx

Contact information

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