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Bio-Rad PT7125 Barrel Plasma Etcher
A 150 W, 13.56 MHz cylindrical plasma chamber designed to produce an isotropic etch.
Category: | Oxygen Plasma Etcher |
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Managed by: | Department of Chemistry, University of Oxford |
Location: | Chemistry Research Laboratory, University Science Area |
Facility: | Surface Analysis Facility (SAF) |
Availability: | http://saf.chem.ox.ac.uk/booking-oxford.aspx |
Shareability: | None |
Access prerequisites: | Part of the Surface Analysis Facility (SAF). Facility open to other University departments (if capacity). |
Restrictions on use: | Trained personnel only. Offered as a service. |
More information: | http://saf.chem.ox.ac.uk/home.aspx |