Bio-Rad PT7125 Barrel Plasma Etcher

A 150 W, 13.56 MHz cylindrical plasma chamber designed to produce an isotropic etch.

Category:	Oxygen Plasma Etcher
Managed by:	Department of Chemistry, University of Oxford
Location:	Chemistry Research Laboratory, University Science Area
Facility:	Surface Analysis Facility (SAF)
Availability:	http://saf.chem.ox.ac.uk/booking-oxford.aspx
Shareability:	None
Access prerequisites:	Part of the Surface Analysis Facility (SAF). Facility open to other University departments (if capacity).
Restrictions on use:	Trained personnel only. Offered as a service.
More information:	http://saf.chem.ox.ac.uk/home.aspx