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Nano Fabrication and Electron Microscopy

The foundation of the facility is a Class 100 and Class 1000 cleanroom suite used for sample preparation and lithography, including equipment for resist processing, thin-film deposition, and etching. We provide training for researchers to use our electron beam lithography, focused ion beam lithography, and UV photolithography systems. Users can also access scanning electron microscopes and carry out elemental microanalysis within the facility.

Category: Electron Beam Lithography
Managed by: Department of Physics, University of Oxford
Location: Clarendon Laboratory - Lindemann, University Science Area
Facility: Nano Fabrication and Electron Microscopy
Shareability: None
More information: http://www2.physics.ox.ac.uk/enterprise/services-and-specialist-equipment/nanofabrication-electron-microscopy

Contact information

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