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Nano Fabrication and Electron Microscopy
| Category: | Electron Beam Lithography |
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| Managed by: | Department of Physics, University of Oxford |
| Description: | The Nanofabrication & Electron Microscopy Facility is a Small Research Facility (SRF) within the Department of Physics which provides researchers with access to state-of-the-art capabilities for micro- and nano-fabrication and scanning electron microscopy. The Facility is primarily used by members of the Department and the wider University, but is also available to those outside the University, including academic, commercial and industrial users. |
| More information: | http://www2.physics.ox.ac.uk/enterprise/services-and-specialist-equipment/nanofabrication-electron-microscopy |
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Nano Fabrication and Electron Microscopy
- Location:
- Clarendon Laboratory - Lindemann, University Science Area
The foundation of the facility is a Class 100 and Class 1000 cleanroom suite used for sample preparation and lithography, including equipment for resist processing, ...